As machines have been automated in the field of industries in recent years, it is a paramount importance to manage and maintain the automation machines. When a fault occurs in sensors attached to the machine, the machine may malfunction and further, a huge damage will be caused in the process line. To prevent the situation, the fault of sensors should be monitored, diagnosed and classified in a proper way. In the paper, we propose a sensor fault detection scheme based on SVM and CNN to detect and classify typical sensor errors such as erratic, drift, hard-over, spike, and stuck faults. Time-domain statistical features are utilized for the learning and testing in the proposed scheme, and the genetic algorithm is utilized to select the subset of optimal features. To classify multiple sensor faults, a multi-layer SVM is utilized, and ensemble technique is used for CNN. As a result, the SVM that utilizes a subset of features selected by the genetic algorithm provides better performance than the SVM that utilizes all the features. However, the performance of CNN is superior to that of the SVM.